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E-LMTE390-XY-330X330 Large travel hollow linear motor stage
It is used in large hollow microscopes and is widely used in semiconductor inspection.
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EC-ABL260-X Series (economical magnetic preload series）
● Travel ranges to 200mm to 600 mm
● Load capacity 25 kg
● Air-Bearing Design
● features a smaller cross-section than typical air-bearing stages without sacrificing load capability. The large air-bearing surfaces provide excellent stiffness, allowing for heavy loading. Proprietary manufacturing
● techniques result in a stage with unsurpassed pitch, roll and yaw characteristics.
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E-ABW400-X One-dimensional air floating platform
● Ideal for scanning applications or high-precision positioning
● Cleanroom compatible
● Size of the motion platform 400 mm × 138 mm
● Travel ranges 200 mm to 1000 mm
● Resolution to 5 nm
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EH–THA series active shock absorber Vibration Isolators
Elastomeric vibration isolators use special geometry profiled elastomers and mounting
fixtures to provide passive vibration isolation in high throughput motion applications
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E-THS series passive vibration absorberseries Vibration Isolators
E-THS series passive vibration absorber
THS series vibration absorbers are mainly used to minimize the stabilization time required for semiconductors, panels, optical equipment, 3C equipment, 5G related equipment and testing equipment, and effectively provide vibration reduction and vibration reduction performance, so they can be used at different speeds and loads. A platform for movement.
By integrating years of technology and knowledge accumulation, we can quickly launch high-quality one-stop micro-vibration solutions based on customer needs and high-end manufacturing. -
optical encoders
The ORH40 open grating displacement encoder adopts a non-contact reflective design and is used for precise position feedback. The encoder system uses a special stainless steel belt with high corrosion resistance and high reflectivity as the scale of the system. Able to output industry standard incremental (A quad B) digital square wave signals or analog
Sinusoidal signal. The unique design makes the ORH40 series open grating linear displacement encoder have more outstanding performance and better stability than traditional displacement encoders.
The encoder adopts high-performance integrated interpolation technology, which can provide stable and reliable position signals for various demanding measurement and motion control applications without the need for additional adapters or separate interfaces.
The built-in Set-up LED allows customers to install this series of gratings more quickly, and can troubleshoot system faults in a timely manner through the color of the LED.
ORH40 series grating linear displacement encoder can be widely used in X-Y platform, semiconductor processing, LED packaging, electronic manufacturing, machine vision, coordinate measurement, PCB equipment, altimeter, electronic assembly, linear motor and other customized linear displacement encoders. exercise environment. -
EABRX-M150 Air Bearing rotation stage
Surface metrology, including the measurement of roundness, flatness, and form error•Micro- and nanotomography•Beamline and synchrotron research•Precision manufacturing, including diamond turning, grinding and other high-performance machine toolapplications•Optical alignment, inspection and calibration systems•Engineered for Precision•The EABRX series is meticulously engineered to consistently satisfy even the most stringent performancerequirements. At its core is an industry-leading, air-bearing technology that delivers nanometer-level errormotion performance with high stiffness and load-carrying capabilities. -
E-SDM264 Series DD motor
Advantages Of Torque MotorNo drive belt adjustment /replacementFewer partsBetter servo performanceSilent operation -
E-SDM160 Series DD motor
Advantages Of Torque MotorNo drive belt adjustment /replacementFewer partsBetter servo performanceSilent operation -
E-SDM115 Series DD(Direct drive) motor
Advantages Of Torque MotorNo drive belt adjustment /replacementFewer partsBetter servo performanceSilent operation -
E-SUM-DM4 Series linear motor
- Peak thrust：129~3300N- Sustained thrust：39~1100N- The patented technology of anti cogging effectis adopted to minimize the cogging effect- High motor constant（Km）- High thrust density- Zero contact, maintenance free, brushless design- Three phase sine wave commutation- The maximum acceleration can easily exceed10G- High positioning accuracy and high resolution- The setting time is very short- Low heat loss- Modular magnet design- Minimal shape- Low attraction● High Force● Excellent acceleration performance● Strong overload capacity● Small cogging force● Modular design -
E-SUM-DM3 Series linear motor
- Peak thrust：129~3300N- Sustained thrust：39~1100N- The patented technology of anti cogging effectis adopted to minimize the cogging effect- High motor constant（Km）- High thrust density- Zero contact, maintenance free, brushless design- Three phase sine wave commutation- The maximum acceleration can easily exceed10G- High positioning accuracy and high resolution- The setting time is very short- Low heat loss- Modular magnet design- Minimal shape- Low attraction● High Force● Excellent acceleration performance● Strong overload capacity● Small cogging force● Modular design
